Speaker
Joris Scheers
(Advanced Research Center for Nanolithography)
Keywords
EUV
EBIT
Sn plasma
| Topics | Fundamental Aspects, Structure and Spectroscopy |
|---|
Primary author
Joris Scheers
(Advanced Research Center for Nanolithography)
Co-authors
Dr
Chintan Shah
(Max-Planck-Institut für Kernphysik, Heidelberg)
Dr
H Bekker
(Max Planck Institute for Nuclear Physics)
Dr
A Windberger
(Advanced Research Center for Nanolithography)
Mr
F Torretti
(Advanced Research Center for Nanolithography)
Prof.
W Ubachs
(Vrije Universiteit Amsterdam)
Prof.
R Hoekstra
(University of Groningen)
Mr
José R. Crespo López-Urrutia
(Max-Planck-Institut für Kernphysik)
Dr
O O Versolato
(ARCNL)
